High voltage solutions for E-beam lithography
Low temperature coefficient with no partial discharges
E-beam lithography allows the creation of nanoscale patterns in semiconductor manufacturing and research applications. However, partial discharge and low stability at high voltages impact the performance of e-beam lithography tools which can lead to lost revenue for semiconductor manufacturers.
High stability power supplies prevent yield issues
The stability, precision and performance needed in a power supply
Equipment damage due to short circuit and shielding issues is a problem for design engineers as it affects yield. To deliver the performance needed, e-beam tools require power solutions with high precision and a low temperature coefficient with no partial discharges.
Our integrated and customized solutions provide the high voltage stability, low ripple and short circuit protection you need.
High stability products for e-beam lithography applications
HCP5K0 Series
Output voltages 0-3.5kVDC to 0-12.5kVDC
3 phase AC input, 6U 19" rack mount
Manual voltage & current control with digital display
Digital, LAN & USB interface option
Analog programming/interface option
Continuous operation at full rated power
Short circuit & arc protection, integrated arc counter
MCA9K0 Series
Output voltages 0-150VDC to 0-3kVDC
For models up to 1.5kVDC: floating output
Autoranging characteristic with fixed power limit
Voltage & current control with 10 turn potentiometer
Control mode display with LED’s & power limit LED
Digital, LAN & USB interface option
Short circuit & arc protection
HCH15K0 Series
Output voltages 0-20kVDC to 0-300kVDC
Voltage & current setting via 10-turn potentiometers
Voltage & current regulation with automatic transition
Control modes indicated by LEDs
Unlimited operation at rated power
Safey interlock loop monitors
Short-circuit & arc proof